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SECS/GEM Interface Manual
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SECS/GEM Interface Manual
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Document Control
Document Control
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Overview
Overview
Introduction
Communication
Communication
HSMS Configuration
Communication State
GEM 200
GEM 200
GEM Compliance
State Models
State Models
Control State
Processing State
Spooling State
Data Definitions
Data Definitions
Variables
Collection Events
Alarms
Equipment Control
Equipment Control
Remote Commands
Process Program
Message Scenarios
Message Scenarios
Communication Establish
Host Command
Process Complete
Recipe Management
GEM 300
GEM 300
Overview
Carrier Management (E87)
Carrier Management (E87)
Carrier State
Load Port State
Access Mode
Job Management
Job Management
Process Job (E40)
Control Job (E94)
Additional Features
Additional Features
Substrate Tracking (E90)
Terminal Services (E116)
Message Reference
Message Reference
Stream 1 - Equipment Status
Stream 2 - Equipment Control
Stream 5 - Alarm Management
Stream 6 - Data Collection
Stream 7 - Process Program
Stream 10 - Terminal Services
GEM 300 Streams
Message Scenarios
Appendix
Appendix
Data Items
Error Codes
Glossary
Legal
Legal
Disclaimer
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